Circularly symmetric nanopores in 3D femtosecond laser nanolithography with burst control and the role of energy dose

  1. Paz-Buclatin, F.
  2. Esquivel-González, M.
  3. Casasnovas-Melián, A.
  4. De Varona, O.
  5. Cairós, C.
  6. Trujillo-Sevilla, J.M.
  7. Kamada, K.
  8. Yoshikawa, A.
  9. Rodríguez-Ramos, J.M.
  10. Martin, L.L.
  11. Ródenas, A.
Journal:
Nanophotonics

ISSN: 2192-8614

Year of publication: 2023

Volume: 12

Issue: 8

Pages: 1511-1525

Type: Article

DOI: 10.1515/NANOPH-2022-0665 GOOGLE SCHOLAR lock_openOpen access editor