Stitching-Based Resolution Enhancement in Wavefront Phase Measurement of Silicon Wafer Surfaces

  1. Ivanov-Kurtev, K.
  2. Trujillo-Sevilla, J.M.
  3. Rodríguez-Ramos, J.M.
Journal:
Applied Sciences (Switzerland)

ISSN: 2076-3417

Year of publication: 2025

Volume: 15

Issue: 3

Type: Article

DOI: 10.3390/APP15031019 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus