High level communication interface design for integrated MEMS and microinstrument bus

  1. Rodríguez, M.
  2. Magdaleno, E.
  3. Ferrer, C.
  4. Lorente, B.
  5. Ayala, A.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Year of publication: 2005

Volume: 5836

Pages: 107-115

Type: Conference paper

DOI: 10.1117/12.608642 GOOGLE SCHOLAR