High-resolution wave front phase sensor for silicon wafer metrology

  1. Trujillo-Sevilla, J.M.
  2. Casanova Gonzalez, O.
  3. Bonaque-González, S.
  4. Gaudestad, J.
  5. Rodríguez Ramos, J.M.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996-756X,  0277-786X

ISBN: 9781510624924

Year of publication: 2019

Volume: 10925

Type: Conference paper

DOI: 10.1117/12.2505764 GOOGLE SCHOLAR
Data source: Scopus