Transport theories of sputtering

  1. Jakas, M.M.
Journal:
Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences

ISSN: 1364-503X

Year of publication: 2004

Volume: 362

Issue: 1814

Pages: 139-156

Type: Review

DOI: 10.1098/RSTA.2003.1305 GOOGLE SCHOLAR
Data source: Scopus