New metrology technique for measuring wafer geometry on a full 300mm silicon wafer

1. Trujillo-Sevilla, J.M.
2. Casanova-González, O.
3. Velasco-Ocaña, M.
4. Ceruso, S.
5. Oliva-Garciá, R.
6. Gómez-Cárdenes, O.
7. Martín-Hernández, J.
8. Roqué-Velasco, A.
9. Pérez-Garciá, A.
10. Ramos-Rodríguez, J.M.
11. Gaudestad, J.O.