New wave front phase sensor used for 3D shape measurements of patterned silicon wafers
- Trujillo-Sevilla, Juan M.
- Gomez-Cardenes, Oscar
- Roque-Velasco, Alex
- Sicilia, Miguel A.
- Gonzalez Pardo, Javier
- Manuel Ramos-Rodriguez, Jose
- Gaudestad, Jan O.
- Itani, T (coord.)
- Naulleau, PP (coord.)
- Gargini, PA (coord.)
- Ronse, KG (coord.)
ISSN: 0277-786X, 1996-756X
ISBN: 978-1-5106-5640-6
Year of publication: 2022
Volume: 12292
Congress: International Conference on Extreme Ultraviolet Lithography
Type: Conference paper