High-resolution wave front phase sensor for silicon wafer metrology

  1. Trujillo-Sevilla, J.M. 1
  2. Casanova Gonzalez, O. 1
  3. Bonaque-González, S. 1
  4. Gaudestad, J. 1
  5. Rodríguez Ramos, J.M. 12
  1. 1 Wooptix S.L. Avda. Trinidad
  2. 2 Cibican. Campus de Ciencias de la Salud S/n la Laguna
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

Publisher: SPIE

ISSN: 1996-756X

ISBN: 9781510624924

Year of publication: 2019

Volume: 10925

Type: Conference paper

Export: RIS
DOI: 10.1117/12.2505764 SCOPUS: 2-s2.0-85067927045 GOOGLE SCHOLAR
Data source: Scopus