Effect of photoetching on porous silicon morphology

  1. Guerrero-Lemus, R.
  2. Moreno, J.D.
  3. Martín-Palma, R.J.
  4. Martínez-Duart, J.M.
  5. Herrero, P.
  6. Marcos, M.L.
  7. González-Velasco, J.
  8. Gómez, P.
Revue:
Surface and Interface Analysis

ISSN: 0142-2421

Année de publication: 1997

Volumen: 25

Número: 9

Pages: 677-682

Type: Article

DOI: 10.1002/(SICI)1096-9918(199708)25:9<677::AID-SIA281>3.0.CO;2-8 GOOGLE SCHOLAR