Chemical etching effects in porous silicon layers
- Navarro-Urrios, D.
- Pérez-Padrón, C.
- Lorenzo, E.
- Capuj, N.E.
- Gaburro, Z.
- Oton, C.J.
- Pavesi, L.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277-786X
Year of publication: 2003
Volume: 5118
Pages: 109-116
Type: Conference paper