Chemical etching effects in porous silicon layers

  1. Navarro-Urrios, D.
  2. Pérez-Padrón, C.
  3. Lorenzo, E.
  4. Capuj, N.E.
  5. Gaburro, Z.
  6. Oton, C.J.
  7. Pavesi, L.
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Argitalpen urtea: 2003

Alea: 5118

Orrialdeak: 109-116

Mota: Biltzar ekarpena

DOI: 10.1117/12.499073 GOOGLE SCHOLAR
Datuen iturria: Scopus