Energy reflection by back-scattering and sputtering: Total yields and angular distribution

  1. Jakas, M.M.
  2. Williams, M.M.R.
Journal:
Journal of Physics D: Applied Physics

ISSN: 0022-3727

Year of publication: 1980

Volume: 13

Issue: 7

Pages: 1169-1180

Type: Article

DOI: 10.1088/0022-3727/13/7/012 GOOGLE SCHOLAR