Three-dimensional fs-laser subtractive nanolithography of crystals

  1. Ródenas, A.
  2. Paz-Buclatin, F.
  3. Casasnovas Melián, A.
  4. De Varona, O.
  5. Martin, L.L.
  6. Martin, I.R.
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996-756X 0277-786X

ISBN: 9781510648494

Year of publication: 2022

Volume: 11989

Type: Conference paper

DOI: 10.1117/12.2608613 GOOGLE SCHOLAR