Wave front phase imaging for silicon wafer metrology

  1. Trujillo-Sevilla, J.M.
  2. Roqué-Velasco, A.
  3. Jesús Sicilia, M.
  4. Casanova-González, Ó.
  5. Rodríguez-Ramos, J.M.
  6. Gaudestad, J.O.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996-756X,  0277-786X

ISBN: 9781510654167

Year of publication: 2022

Volume: 12216

Type: Conference paper

DOI: 10.1117/12.2632499 GOOGLE SCHOLAR
Data source: Scopus