Accurate estimation of aberrations of microoptics components through intensity measurements: Numerical simulations for best positioning and noise analysis

  1. Soto, M.
  2. Ríos, S.
  3. Acosta, E.
  4. Voitsekhovich, V.
Journal:
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

ISSN: 0021-4922

Year of publication: 2000

Volume: 39

Issue: 3 B

Pages: 1562-1565

Type: Article