High speed roughness measurement on blank silicon wafers using wave front phase imaging

  1. Trujillo-Sevilla, J.M.
  2. Rodríguez-Ramos, J.M.
  3. Gaudestad, J.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996-756X 0277-786X

ISBN: 9781510634176

Year of publication: 2020

Volume: 11325

Type: Conference paper

DOI: 10.1117/12.2547406 GOOGLE SCHOLAR