High speed roughness measurement on blank silicon wafers using wave front phase imaging

  1. Trujillo-Sevilla, J.M.
  2. Rodríguez-Ramos, J.M.
  3. Gaudestad, J.
Actes de conférence:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996-756X,  0277-786X

ISBN: 9781510634176

Année de publication: 2020

Volumen: 11325

Type: Communication dans un congrès

DOI: 10.1117/12.2547406 GOOGLE SCHOLAR
La source de données: Scopus