A comparison between multiple interaction computer simulations and the linear theory of sputtering

  1. Jakas, M.M.
  2. Harrison Jr., D.E.
Journal:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Year of publication: 1986

Volume: 14

Issue: 4-6

Pages: 535-541

Type: Article

DOI: 10.1016/0168-583X(86)90151-5 GOOGLE SCHOLAR
Data source: Scopus