A comparison between multiple interaction computer simulations and the linear theory of sputtering

  1. Jakas, M.M.
  2. Harrison Jr., D.E.
Aldizkaria:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Argitalpen urtea: 1986

Alea: 14

Zenbakia: 4-6

Orrialdeak: 535-541

Mota: Artikulua

DOI: 10.1016/0168-583X(86)90151-5 GOOGLE SCHOLAR