Anisotropy and Mechanistic Elucidation of Wet-Chemical Gallium Nitride Etching at the Atomic Level
- Tautz, M.
- Weimar, A.
- Graßl, C.
- Welzel, M.
- Díaz Díaz, D.
ISSN: 1862-6319, 1862-6300
Year of publication: 2020
Volume: 217
Issue: 21
Type: Article
ISSN: 1862-6319, 1862-6300
Year of publication: 2020
Volume: 217
Issue: 21
Type: Article