Anisotropy and Mechanistic Elucidation of Wet-Chemical Gallium Nitride Etching at the Atomic Level
- Tautz, M.
- Weimar, A.
- Graßl, C.
- Welzel, M.
- Díaz Díaz, D.
ISSN: 1862-6319, 1862-6300
Année de publication: 2020
Volumen: 217
Número: 21
Type: Article
Revue:
Physica Status Solidi (A) Applications and Materials Science
