High-Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS-b-PMMA Block Copolymer Nanomasks during Mask Development
- Bürger, J.
- Venugopal, H.
- Kool, D.
- de los Arcos, T.
- Gonzalez Orive, A.
- Grundmeier, G.
- Brassat, K.
- Lindner, J.K.N.
Zeitschrift:
Advanced Materials Interfaces
ISSN: 2196-7350
Datum der Publikation: 2022
Ausgabe: 9
Nummer: 26
Art: Artikel
