High-Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS-b-PMMA Block Copolymer Nanomasks during Mask Development
- Bürger, J.
- Venugopal, H.
- Kool, D.
- de los Arcos, T.
- Gonzalez Orive, A.
- Grundmeier, G.
- Brassat, K.
- Lindner, J.K.N.
Revue:
Advanced Materials Interfaces
ISSN: 2196-7350
Année de publication: 2022
Volumen: 9
Número: 26
Type: Article
