High-Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS-b-PMMA Block Copolymer Nanomasks during Mask Development

  1. Bürger, J.
  2. Venugopal, H.
  3. Kool, D.
  4. de los Arcos, T.
  5. Gonzalez Orive, A.
  6. Grundmeier, G.
  7. Brassat, K.
  8. Lindner, J.K.N.
Journal:
Advanced Materials Interfaces

ISSN: 2196-7350

Year of publication: 2022

Volume: 9

Issue: 26

Type: Article

DOI: 10.1002/ADMI.202200962 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus