Surface Morphology Evolution of Chemical Vapor-Deposited Tungsten Films on Si(100)
- Vázquez, L.
- Salvarezza, R.C.
- Albano, E.
- Arvia, A.J.
- Hernández Creus, A.
- Levy, R.A.
- Albella, J.M.
ISSN: 0948-1907
Year of publication: 1998
Volume: 4
Issue: 3
Pages: 89-91
Type: Article