Surface Morphology Evolution of Chemical Vapor-Deposited Tungsten Films on Si(100)

  1. Vázquez, L.
  2. Salvarezza, R.C.
  3. Albano, E.
  4. Arvia, A.J.
  5. Hernández Creus, A.
  6. Levy, R.A.
  7. Albella, J.M.
Aldizkaria:
Chemical Vapor Deposition

ISSN: 0948-1907

Argitalpen urtea: 1998

Alea: 4

Zenbakia: 3

Orrialdeak: 89-91

Mota: Artikulua

DOI: 10.1002/(SICI)1521-3862(199805)04:03<89::AID-CVDE89>3.0.CO;2-9 GOOGLE SCHOLAR

Objetivos de desarrollo sostenible