Spike models for sputtering: Effect of the surface and the material stiffness

  1. Bringa, E.M.
  2. Jakas, M.
  3. Johnson, R.E.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Any de publicació: 2000

Volum: 164

Pàgines: 762-771

Tipus: Article

DOI: 10.1016/S0168-583X(99)01068-X GOOGLE SCHOLAR