Spike models for sputtering: Effect of the surface and the material stiffness
- Bringa, E.M.
- Jakas, M.
- Johnson, R.E.
Zeitschrift:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ISSN: 0168-583X
Datum der Publikation: 2000
Ausgabe: 164
Seiten: 762-771
Art: Artikel