Spike models for sputtering: Effect of the surface and the material stiffness

  1. Bringa, E.M.
  2. Jakas, M.
  3. Johnson, R.E.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2000

Alea: 164

Orrialdeak: 762-771

Mota: Artikulua

DOI: 10.1016/S0168-583X(99)01068-X GOOGLE SCHOLAR
Datuen iturria: Scopus