Spike models for sputtering: Effect of the surface and the material stiffness
- Bringa, E.M.
- Jakas, M.
- Johnson, R.E.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ISSN: 0168-583X
Année de publication: 2000
Volumen: 164
Pages: 762-771
Type: Article