A novel study of the growth and resistivity of nanocrystalline Pt films obtained from Pt(acac)2 in the presence of oxygen or water vapor

  1. Battiston, G.A.
  2. Gerbasi, R.
  3. Rodriguez, A.
Journal:
Chemical Vapor Deposition

ISSN: 0948-1907

Year of publication: 2005

Volume: 11

Issue: 3

Pages: 130-135

Type: Article

DOI: 10.1002/CVDE.200404201 GOOGLE SCHOLAR
Data source: Scopus