A novel study of the growth and resistivity of nanocrystalline Pt films obtained from Pt(acac)2 in the presence of oxygen or water vapor

  1. Battiston, G.A.
  2. Gerbasi, R.
  3. Rodriguez, A.
Aldizkaria:
Chemical Vapor Deposition

ISSN: 0948-1907

Argitalpen urtea: 2005

Alea: 11

Zenbakia: 3

Orrialdeak: 130-135

Mota: Artikulua

DOI: 10.1002/CVDE.200404201 GOOGLE SCHOLAR
Datuen iturria: Scopus