High speed roughness measurement on blank silicon wafers using wave front phase imaging

  1. Trujillo-Sevilla, J.M. 1
  2. Rodríguez-Ramos, J.M. 1
  3. Gaudestad, J. 2
  1. 1 Wooptix
  2. 2 Wooptix
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

Publisher: SPIE

ISSN: 1996-756X

ISBN: 9781510634176

Year of publication: 2020

Volume: 11325

Type: Conference paper

Export: RIS
DOI: 10.1117/12.2547406 SCOPUS: 2-s2.0-85083758025 GOOGLE SCHOLAR
Data source: Scopus