Circularly symmetric nanopores in 3D femtosecond laser nanolithography with burst control and the role of energy dose
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Paz-Buclatin, F.
- Esquivel-González, M.
- Casasnovas-Melián, A.
- De Varona, O.
- Cairós, C.
- Trujillo-Sevilla, J.M.
- Kamada, K.
- Yoshikawa, A.
- Rodríguez-Ramos, J.M.
- Martin, L.L.
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Ródenas, A.
Journal:
Nanophotonics
ISSN: 2192-8614
Year of publication: 2023
Type: Article