Role of microstructure and layer thickness in porous silicon conductometric gas sensors

  1. Gaburro, Z.
  2. Oton, C.J.
  3. Ghulinyan, M.
  4. Pancheri, L.
  5. Pavesi, L.
  6. Capuj, N.
Journal:
Physica Status Solidi (A) Applications and Materials Science

ISSN: 1862-6300 1862-6319

Year of publication: 2005

Volume: 202

Issue: 8

Pages: 1467-1471

Type: Conference paper

DOI: 10.1002/PSSA.200461138 GOOGLE SCHOLAR