A Theoretical Method for Removal of Gravity-Induced Effects in Silicon Wafer Geometry Measurements

  1. Trujillo-Sevilla, J.M.
  2. Gaudestad, J.
  3. Rodríguez-Ramos, J.M.
Revista:
Applied Sciences (Switzerland)

ISSN: 2076-3417

Any de publicació: 2022

Volum: 12

Número: 18

Tipus: Article

DOI: 10.3390/APP12189049 GOOGLE SCHOLAR lock_openAccés obert editor
Font de les dades: Scopus