A Theoretical Method for Removal of Gravity-Induced Effects in Silicon Wafer Geometry Measurements

  1. Trujillo-Sevilla, J.M.
  2. Gaudestad, J.
  3. Rodríguez-Ramos, J.M.
Aldizkaria:
Applied Sciences (Switzerland)

ISSN: 2076-3417

Argitalpen urtea: 2022

Alea: 12

Zenbakia: 18

Mota: Artikulua

DOI: 10.3390/APP12189049 GOOGLE SCHOLAR lock_openSarbide irekia editor
Datuen iturria: Scopus