A Theoretical Method for Removal of Gravity-Induced Effects in Silicon Wafer Geometry Measurements

  1. Trujillo-Sevilla, J.M.
  2. Gaudestad, J.
  3. Rodríguez-Ramos, J.M.
Journal:
Applied Sciences (Switzerland)

ISSN: 2076-3417

Year of publication: 2022

Volume: 12

Issue: 18

Type: Article

DOI: 10.3390/APP12189049 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus