A Theoretical Method for Removal of Gravity-Induced Effects in Silicon Wafer Geometry Measurements

  1. Trujillo-Sevilla, J.M.
  2. Gaudestad, J.
  3. Rodríguez-Ramos, J.M.
Revue:
Applied Sciences (Switzerland)

ISSN: 2076-3417

Année de publication: 2022

Volumen: 12

Número: 18

Type: Article

DOI: 10.3390/APP12189049 GOOGLE SCHOLAR lock_openAccès ouvert editor
La source de données: Scopus