A Theoretical Method for Removal of Gravity-Induced Effects in Silicon Wafer Geometry Measurements
- Trujillo-Sevilla, J.M.
- Gaudestad, J.
- Rodríguez-Ramos, J.M.
Zeitschrift:
Applied Sciences (Switzerland)
ISSN: 2076-3417
Datum der Publikation: 2022
Ausgabe: 12
Nummer: 18
Art: Artikel