Subtractive 3D Laser Nanolithography of Crystals by Giant Wet-Chemical Etching Selectivity

  1. Seguí, A.R.
Book Series:
Springer Series in Optical Sciences

ISSN: 1556-1534,  0342-4111

Year of publication: 2023

Volume: 239

Pages: 725-757

Type: Book chapter

DOI: 10.1007/978-3-031-14752-4_20 GOOGLE SCHOLAR
Data source: Scopus